Description
P-620.1CD - P-625.1CD PIHera® systems are piezo nano-translation stages featuring travel ranges from 50 to 500 µm. Despite the increased travel ranges the units are extremely compact, while providing sub-nanometer resolution. The long travel range is achieved with a newly designed, friction-free and extremely stiff flexure system which also offers excellent guiding accuracy (typically less than 5 µrad pitch/yaw over the full travel range) and rapid settling.
Superior Accuracy Through Direct-Motion-Metrology Capacitive Feedback Sensors
Applications such as optical path control in interferometry, or sample positioning in microscopy require long travel ranges with nanometer positioning accuracy. PIHera® offers travel ranges to 500 µm. The closed-loop versions are equipped with non contact, zero friction, direct-measuring two-plate capacitve position sensors. Unlike conventional indirect sensors (such as strain gauge / piezo resistive sensors), they measure the position directly rather than the strain in the actuator / guiding system.
Capacitive sensors are absolute-measuring high-bandwidth devices and show none of the periodic errors found in incremental encoders. This permits motion linearity of better than 0.01 % and effective resolution in the sub-nanometer range. This technique, combined with the inherent precision of the PI two-plate capacitive sensor and the temperature-compensated design, results in higher linearity scans, and provides superior responsiveness, resolution, repeatability and stability.
- Travel to 500 µm
- Compact Design
- Resolution < 1 nm
- Low Cost
- New Longlife Piezo Drive
- Capacitive Feedback (Closed-Loop)
- 0.01 % Position Accuracy
- X, XY, Z, XYZ Versions
- Vacuum-Compatible Versions